Mask Aligners

High performance products, built to last！

• Technologically Advanced Mask Aligners

• Incredibly fast and accurate electromagnetic linear stage motors

• Smart Align Technology-superior auto alignment algorithms

• Integrated OBS and IR backside alignment unit with no hardware conversion

• Best in class dual arm robot and pre-aligner optimized Tor highest T-put

Application

• MEMs

• WLP

• 3DIC and SiP

• Compound Semi

• Optoelectronics

• LED

• 2.5D Interposer - TSV

• Solar - HCPV

▶ NXQ4000 Series – R&D & pilot line production

▶ NXQ8000 Series – Scalable, high volume production platform