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EXPANDED PLASMA CLEANER
EXPANDED PLASMA CLEANER PDC-001 (115V) | PDC-002 (230V)
Our Expanded Plasma Cleaner is a larger benchtop plasma instrument and extensively used for nanoscale surface cleaning and surface activation.
FEATURES Larger, benchtop unit Adjustable RF power settings (Low, Medium, High) Maximum RF powerof 30W Includes a 6″ diameter x 6.5″ length Pyrex chamber Hinged door with viewing window Active fan cooling Integral switch for a vacuum pump 1/8″ NPT metering valve to qualitatively control gas flow and chamber pressure 1/8″ NPT 3-way valve to quickly switch from introducing gas, venting and isolating the chamber Weight: 37 lbs Size: 11″ H x 18″ W x 9″ D
Optional PlasmaFlo gas mixer allows quantitative control of up to two (2) process gases and monitoring of vacuum pressure Optional quartz chamber and sample tray Compatible vacuum pump available
REQUIREMENTS Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23L/min) and ultimate total pressure of 200 mTorr (0.27 mbar) or less. |