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Mask Aligners 詳細説明 Mask Aligners
High performance products, built to last! • Technologically Advanced Mask Aligners • Incredibly fast and accurate electromagnetic linear stage motors • Smart Align Technology-superior auto alignment algorithms • Integrated OBS and IR backside alignment unit with no hardware conversion • Best in class dual arm robot and pre-aligner optimized Tor highest T-put
Application • MEMs
• WLP
• 3DIC and SiP
• Compound Semi
• Optoelectronics
• LED
• 2.5D Interposer - TSV
• Solar - HCPV
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