EXPANDED PLASMA CLEANER

PDC-001 (115V) | PDC-002 (230V)

Our Expanded Plasma Cleaner is a larger benchtop plasma instrument and extensively used for nanoscale surface cleaning and surface activation.

FEATURES

Larger, benchtop unit

Adjustable RF power settings (Low, Medium, High)

Maximum RF powerof 30W

Includes a 6″ diameter x 6.5″ length Pyrex chamber

Hinged door with viewing window

Active fan cooling

Integral switch for a vacuum pump

1/8″ NPT metering valve to qualitatively control gas flow and chamber pressure

1/8″ NPT 3-way valve to quickly switch from introducing gas, venting and isolating the chamber

Weight: 37 lbs

Size: 11″ H x 18″ W x 9″ D

Optional PlasmaFlo gas mixer allows quantitative control of up to

two (2) process gases and monitoring of vacuum pressure

Optional quartz chamber and sample tray

Compatible vacuum pump available

REQUIREMENTS

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23L/min) and ultimate total pressure of 200 mTorr (0.27 mbar) or less.